PARAMETERS
Product Name: | 6 INCH 12 SLOT PEEK CASSETTE |
Material: | ESD PEEK |
Dimension: | L143*W177*H171 |
Slot pitch: | 9.5mm |
Weight: | 505g |
Part No.: | 6-12PEEK-CASS |
Capacity: | 12 PCS 6 INCH WAFER |
Product Name: | 6 INCH 12 SLOT PEEK CASSETTE |
Material: | ESD PEEK |
Dimension: | L143*W177*H171 |
Slot pitch: | 9.5mm |
Weight: | 505g |
Part No.: | 6-12PEEK-CASS |
Capacity: | 12 PCS 6 INCH WAFER |
Material | Temperature limits | Marking | Color | Handle |
PEEK+CNT | 120°C (248°F) continuous use 340°C (644°F) wafer insertion | laser marking/inkjet printing | Black | Optional |
PEEK Polymer ESD has excellent high temperature resistance, wear resistance, chemical resistance, dimensional stability and anti-static properties,helping to prevent particle contamination and improve the reliability of wafer handling, storage and transfer.
PEEK cassette is a loading tool for storing and transporting semiconductor wafers.
Enables precise wafer access.
Enables reliable equipment operation on process tools and automated materials handling systems.
Secures and protects wafer against contamination and damage.
